A goal in each half from Michael Higdon and Carl Finnigan were enough to give the Bairns three points in their final home game of the season.
Falkirk tested Michael Fraser in the opening minute when Higdon met Tom Scobbie's free-kick with his head but the goalkeeper was well positioned to save.
Caley Thistle hit back and Barry Wilson should have netted when the skipper rounded Shane Supple on the angle of the penalty area but lofted his shot over the crossbar with the goal vacant.
It was a lively encounter and Higdon was unfortunate again when he met another Scobbie cross but his low header was saved by Fraser.
The big striker should have done better moments later when he pounced on a flick from Pedro Moutinho but dragged his shot wide when he had time to pick his spot.
David Proctor was then caught in possession by Moutinho who flicked the ball past Fraser on the edge of the area but Richard Hastings got back swiftly to clear the danger.
Kevin McBride then showed neat footwork on the edge of the box before lashing a shot narrowly wide of Fraser's right-hand post.
Falkirk made the belated breakthrough after 28 minutes. Darren Barr failed to get any clean contact on a header from Moutinho's corner but Higdon was alert enough at the back post to slide the ball home.
Moments later, Moutinho had a chance to score a second goal from Finnigan's cross but Ross Tokely managed to get across to block his shot.
Some slack play by Patrick Cregg in his own area gave Rory McAllister a chance from an acute angle only for Supple to touch the shot away for a corner.
The excellent Chris Mitchell then tried to catch out Fraser at the other end with a looping effort which the goalkeeper did well to push away for a corner.
Supple produced the save of the match when he pulled down a shot from Don Cowie which was bound for the top corner of his net.
Caley Thistle had a couple of chances early in the second half - McAllister just failed to connect with a header in front of goal and then Roy McBain hit the side-netting.
But it was Falkirk that extended their lead with an excellent goal after 68 minutes. Moutinho fed Finnigan and he rifled the ball high into the net to leave Fraser with no chance.
Caley Thistle finished strongly. Tokely headed against the post late on and then Wilson scored a stoppage-time penalty after he had been fouled in the box by Scobbie.